ATHENA_ADAPTMESH : Process Simulation with Adaptive Meshing

• amex01.in : Trench Isolation Structure
• amex02.in : Poly Emiter Bipolar Device Structure (PNP)
• amex03.in : LOCOS Isolation Structure
• amex04.in : Tilt Implant and Anneal on Irregular Mesh
• amex05.in : MOS Device Structure
• amex06.in : CCD Structure Formation
• amex07.in : Flash EPROM Formation