ATHENA_COMPLEX : Complex Process Examples

• anex01.in : Non-planar Optical Lithography
• anex02.in : Trench Isolation Example
• anex03.in : Comparison of Simple and Realistic Resist Surfaces
• anex04.in : Metal Patterning Over Non-planar Topography
• anex05.in : Multi-level Interconnect Formation
• anex06.in : Trench Formation and Planarization
• anex07.in : Trench Oxidation
• anex08.in : DevEdit Mesh Adaptation with ELITE and SSUPREM4
• anex09.in : GaAs on Silicon Process
• anex10.in : Trench Etching and Lithography
• anex11.in : CMOS Example Using MaskViews
• anex12.in : Bipolar Example Using MaskViews