ATHENA_CALIBRATION : Process Simulator Calibration

• ancaex01.in : OED Tuning Using TWO.DIM for DRYO2
• ancaex02.in : OED Calibration Using THETA.0
• ancaex03.in : Calibration of Thin WetO2 Oxidation
• ancaex04.in : Tuning LOCOS Shapes using the COMPRESS Model
• ancaex05.in : Tuning Threshold Voltage using Seg.0 and Theta.0
• ancaex06.in : Tuning Directional and Isotropic Etch for Spacer Formation
• ancaex07.in : Multiple Implant Profile Optimization
• ancaex08.in : Extraction of Implant Moments from Measured Data