ATHENA_COMPOUND : Compound Semiconductor Process Simulation

• ancoex01.in : Ion Implant Tilt Angle Dependence
• ancoex02.in : Ion Implant Dose Dependence
• ancoex03.in : GaAs MESFET Gate Simulation in 1D
• ancoex04.in : Zinc Diffusion in N-type Indium Phosphide