ATHENA_MISC : Miscellaneous Process Simulation Examples

• anmiex01.in : Multiple Impurities in a Material (BPSG)
• anmiex02.in : Epitaxial Growth
• anmiex03.in : Phosphorus Segregation Modeling
• anmiex04.in : Substrate Shear Stress
• anmiex05.in : MOSFET Scaling with the STRETCH command
• anmiex06.in : Salicide Example Using Titanium Silicide
• anmiex07.in : Selective and Non-selective Si Deposition
• anmiex08.in : Analytical Etch of a Trench with Angled Sidewalls and Undercuts