VICTORY Stress and its Competitors

VICTORY Stress is a generic 3D stress simulator designed to calculate stresses and mobility enhancement factors for any 3D structure and is a suitable replacement for ANSYS Mechanical and Multiphysics modules, COMSOL Structural Mechanics and MEMS module, Synopsys Sentaurus Process, T_SUPREMIV (SUPREM4). VICTORY Stress provides the following key features: Layout driven stress analysis Comprehensive material stress models, including the dependence of elasticity coefficients on crystal orientation. Generic 3D anisotropic stress simulation for crystalline materials suitable for variety of stress analysis such as:- Strained PMOS, compressive capping layers Mobility enhancements in FinFET channels Stress/strain engineering for MOSFETs, FETs, etc. Stress analysis can be performed over full device structure, accounting for all isotropic and anisotropic properties of the materials, boundaries and initial conditions Simulation of thermal mismatch between materials, stress from materials mismatch Estimate mobility enhancement factors Account for intrinsic stress in deposited material layers Hydrostatic stress model for capping layers, stress memorization effects, stressors and stress liners “Design of Experiments” with VWF can be used to analyze stress dependence on process parameters such as gate length or thickness variations Synopsys Sentaurus Process, T-SUPREMIV (SUPREM4), ANSYS and COMSOL are trademarks of their respective owners.