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TCAD資料　

Technology flow
Workshop on CCD Process and Device Simulation

Contents

  1. Processing of CCD devices using the ATHENA 2D process simulation framework (SSuprem4)
  2. Electrical characteristics of CCDs using the ATLAS 2D device simulation framework (S-Pisces)
  3. Optical characteristics of CCDs using the ATLAS 2D device simulation framework (Luminous)
  4. Fully integrated simulation environment


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