TCAD Products

Process Simulation

VICTORY Process

3D Process Simulator. Includes complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit.

ATHENA 1D

1D mode of operation of the industry standard ATHENA 2D Process Simulator.

ATHENA

Process Simulation Framework. Integrates several process simulation modules in a user-friendly environment provided by Silvaco TCAD interactive tools.

Device Simulation

VICTORY Device

General-purpose 3D device simulator using a tetrahedral meshing engine for fast and accurate simulation of complex 3D geometries.

ATLAS

Device simulation framework that enables simulation of the electrical, optical, and thermal behavior of semiconductor devices.

Stress Simulation

Victory Stress

Generic 3D stress simulator designed to calculate stresses and mobility enhancement factors for any 3D structure using comprehensive material stress models.

Other Tools

Interactive Tools

Suite of pre and post processing tools that provide interactive GUI-based pre and post processing services to Silvaco’s 1D, 2D and 3D TCAD simulators.

Virtual Wafer Fab

Software used for performing Design of Experiments (DOE) and Optimization Experiments.

TCAD VWF ATHENA VICTORY Process VICTORY Cell VICTORY Stress ATLAS VICTORY Device